You are going to get so many answers, based on so many factors.
It depends on what part of the country, cleaning method - (hwe portable or truck mount, encapsulation, both) , level of soil, cleaning during business hours or after hour/weekend access, how many sq. ft. (500 or 5,000, usually a discount for larger jobs). Will you need to bring on extra help to get it done or is this a one man gig? Will the be going on a maintenence program agreement with regularly scheduled cleanings or is it a one time clean? Will you need to move furniture or just open areas (I know this on is empty).
Most importantly, what is your cost of business and how much profit do you want to make? Pricing should be based on that.
We are between .17-.60 sq ft depending on the above factors. Plus scotchgard.